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Simple Method to Evaluate Benzotriazole Passivated Copper Surfaces for Corrosion Protection

IP.com Disclosure Number: IPCOM000121335D
Original Publication Date: 1991-Aug-01
Included in the Prior Art Database: 2005-Apr-03
Document File: 2 page(s) / 74K

Publishing Venue

IBM

Related People

Brusic, VA: AUTHOR [+3]

Abstract

Corrosion protection of copper metallurgy is becoming of critical importance as the dimensions of devices decrease. One method of corrosion protection involves passivation of the metal surface with benzotriazole. The effectiveness of such a protection is normally evaluated by electrochemical techniques and/or accelerated temperature/humidity/ voltage tests. These tests require relatively long times, complicated equipment and operators skilled in their use. Disclosed is an alternate technique which can be used to assess the effectiveness of benzotriazole (and derivatives) for copper passivation.

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Simple Method to Evaluate Benzotriazole Passivated Copper Surfaces
for Corrosion Protection

      Corrosion protection of copper metallurgy is becoming of
critical importance as the dimensions of devices decrease. One method
of corrosion protection involves passivation of the metal surface
with benzotriazole.  The effectiveness of such a protection is
normally evaluated by electrochemical techniques and/or accelerated
temperature/humidity/ voltage tests.  These tests require relatively
long times, complicated equipment and operators skilled in their use.
Disclosed is an alternate technique which can be used to assess the
effectiveness of benzotriazole (and derivatives) for copper
passivation.  By examining the surface wetting, using the Wilhelmy
slide technique [*] of copper which has been processed under a
variety of conditions, a direct correlation has been observed between
features of the wetting behavior and corrosion protection that is
measured electrochemically.  The technique is simple, relatively
rapid, requires no skilled operators, and can be performed using a
commercially available apparatus with no modification.

      A copper sample (a foil or a thin film, sputtered on both sides
of a glass cover slip), untreated or treated with benzotriazole
and/or its derivatives, is connected to the apparatus (Cahn
Instruments, Inc., DCA 312 Dynamic Contact Angle Measurement System)
and subjected to immersion and emersion cycles in a wetting medium,
e.g., distilled water. A microbalance records the weight change as
the sample is introduced and withdrawn from the wetting medium and
displays the data as a weight versus depth of immersion.

      The results show interesting differences in behavior of treated
and untreated copper.  Unprotected copper remains relatively wet over
a region that has been wett...