Browse Prior Art Database

Reducing Inert Gas Consumption in a Reflow Furnace

IP.com Disclosure Number: IPCOM000121353D
Original Publication Date: 1991-Aug-01
Included in the Prior Art Database: 2005-Apr-03
Document File: 2 page(s) / 42K

Publishing Venue

IBM

Related People

Koumides, PA: AUTHOR

Abstract

Disclosed is a modification to a gas-tight reflow furnace which will result in elimination of the use of inert gas used to purge impurities from the process chamber environment. See schematic.

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Reducing Inert Gas Consumption in a Reflow Furnace

      Disclosed is a modification to a gas-tight reflow furnace
which will result in elimination of the use of inert gas used to
purge impurities from the process chamber environment.  See
schematic.

      In a reflow furnace, oxidation-reduction reactions on
electronic components are reduced by maintaining an inert atmosphere
using nitrogen or nitrogen/hydrogen blends, or dissociated
methanol/nitrogen blends.  As impurity builds up in the atmosphere,
it is necessary to purge the atmosphere. Typically, purging is done
by a venturi using the same gas supplied for the atmosphere.  The
purging gas can account between 5% and 15% of the total gas usage.

      This disclosure is a modification to the tubing such that the
exhaust venturies operate from a gas line independent from the
process chamber gas supply.  With this change, clean pressurized air
can be used instead of the inert gas without affecting the purity of
the inert atmosphere.  The net benefit is reduction in the overall
consumption of inert gas.