Browse Prior Art Database

Self Aligned Deposition of High Thermal Conductive Coating on Diode Laser Facets

IP.com Disclosure Number: IPCOM000121414D
Original Publication Date: 1991-Aug-01
Included in the Prior Art Database: 2005-Apr-03
Document File: 1 page(s) / 48K

Publishing Venue

IBM

Related People

Jipson, VB: AUTHOR [+3]

Abstract

This invention pertains to a technique that allows a self aligned deposition of a semiconductor laser facet passivation coating that has high thermal conductivity and large thickness on areas outside the laser emission region. The self aligned deposition mask is defined using the lasing radiation of the laser itself. An efficient heat dissipation coating is obtained leading to a lower facet temperature, hence improvement in the laser lifetime and reliability of a laser diode.

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This is the abbreviated version, containing approximately 75% of the total text.

Self Aligned Deposition of High Thermal Conductive Coating on Diode
Laser Facets

      This invention pertains to a technique that allows a self
aligned deposition of a semiconductor laser facet passivation coating
that has high thermal conductivity and large thickness on areas
outside the laser emission region. The self aligned deposition mask
is defined using the lasing radiation of the laser itself.  An
efficient heat dissipation coating is obtained leading to a lower
facet temperature, hence improvement in the laser lifetime and
reliability of a laser diode.

      The procedure for the proposed self aligned deposition of high
thermal conductive coating is as follows:
      -    After the completion of the standard laser processing, a
conventional insulating passivation coating (such as Al2O3) is
deposited uniformly on the facet.  The thickness of this insulating
layer should be as small as possible for electrical insulation
purposes.
      -    Deposition of photoresist uniformly on the facet. The
resist should be sensitive to the emission lasing wavelength or to
heat.
      -    The laser diode is turned on.  The photoresist in the
laser emission region would then be exposed by the laser.
      -    The photoresist is developed and the unexposed photoresist
is removed, thus leaving a photoresist mask on the laser emission
region.
      -    Deposition of a high thermal conductive coating, such as
copper, to a desirabl...