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Browse Prior Art Database

Process Jet Assembly for Spindle Tool Etcher

IP.com Disclosure Number: IPCOM000121469D
Original Publication Date: 1991-Sep-01
Included in the Prior Art Database: 2005-Apr-03
Document File: 1 page(s) / 26K

Publishing Venue

IBM

Related People

Reischmann, R: AUTHOR

Abstract

This article describes a process jet assembly for high-precision wet etching metal layers in spindle etchers.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 100% of the total text.

Process Jet Assembly for Spindle Tool Etcher

      This article describes a process jet assembly for
high-precision wet etching metal layers in spindle etchers.

      For this purpose, 2-component jets are used which are
positioned at a 90º angle above the horizontal substrate surface.
For square or rectangular substrates, the jets are positioned
asymmetrically to the center of the diagonal and for round
substrates, they are positioned asymmetrically to the diameter.  The
position of the two 2-component jets is 4/12 x !2 a and 9/12 x !2
a for square, 4/12 x !b2+c2 and 9/12 x !b2+c2 for rectangular, and
+/12 x d and 9/12 d for circular substrates, with a being the edge
length of the square, b and c being the edge lengths of the two sides
of the rectangle, and d being the diameter of the circle.

      By adapting the rotational speed and the different flow rates
of the media in the jets, the described assembly ensures optimal etch
results and thus a high degree of uniformity over the entire surface
during wet etching with dimensions of less than 10 mm.