Browse Prior Art Database

Web Temperature Reduction by Magnetic Field Control

IP.com Disclosure Number: IPCOM000121698D
Original Publication Date: 1991-Sep-01
Included in the Prior Art Database: 2005-Apr-03
Document File: 1 page(s) / 53K

Publishing Venue

IBM

Related People

Blackwell, KJ: AUTHOR [+5]

Abstract

Disclosed is a method for controlling substrate heating due to electron bombardment during DC magnetron sputter deposition. Electromagnets located behind the cathode may be used to control the flux of electrons to the substrate surface by varying the electromagnet current.

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This is the abbreviated version, containing approximately 59% of the total text.

Web Temperature Reduction by Magnetic Field Control

      Disclosed is a method for controlling substrate heating
due to electron bombardment during DC magnetron sputter deposition.
Electromagnets located behind the cathode may be used to control the
flux of electrons to the substrate surface by varying the
electromagnet current.

      Typically in DC magnetron sputtering deposition, permanent
magnets are positioned behind the cathode to confine electrons in the
plasma so to intensify the plasma immediately around the target area.
This, in effect, enhances sputter deposition rates, but also induces
increased electron bombardment to surfaces at ground potential in the
immediate area.  When the substrate is at ground potential, as it is
in a web coater of the design employed here, it acts as an electron
sink and, therefore, experiences heating due to electron bombardment.
This heating from electrons may be controlled through the use of
secondary magnets and/or electron trapping (shielding at ground or
positive potential), which draw electrons away from the substrate.
However, by using electromagnets positioned beneath the cathode the
deposition rates remain enhanced yet the electron flux to the
substrate may be controlled, without the use of secondary magnets or
electron traps.  This is accomplished by careful control of the
current supply to the electromagnet, which induces magnetic fields
such that the plasma is enhanced in the vicinity of the target, yet
electro...