Original Publication Date: 1991-Sep-01
Included in the Prior Art Database: 2005-Apr-03
Clark, RK: AUTHOR [+3]
By using individual balls or spheres of material to replenish a vacuum- deposition source instead of feeding wire into the source crucible, fewer maintenance problems are encountered. The design shown is found to be particularly trouble-free.
individual balls or spheres of material to
replenish a vacuum- deposition source instead of feeding wire into
the source crucible, fewer maintenance problems are encountered. The
design shown is found to be particularly trouble-free.
Spheres 2 of
material required for replenishment of crucible 4
are contained in rotatable drum 6. Means for heating crucible 4,
e.g., electron bombardment or RF, is not shown. Islet 8 and
catch-funnel 10 are solidly attached to the interior of drum 6. In
operation, rotating vacuum feedthrough 12 through base plate 14
causes shaft 16 and solidly affixed drum 6 to rotate. A single
sphere 2 is picked up and retained in islet 8 as it rotates slowly
through and up out of the supply of spheres. Remaining spheres
return to the bottom of drum 6 as shown. When islet 8 approaches the
top of its travel as shown, the sphere drops into catch funnel 10,
passes through a hole in the wall of drum 6, and is then guided by
feeder trough 18 to drop into crucible 4.
from crucible 4 may be prevented from condensing on
any surface over which a replenishment ball must travel or on any
gear or bearing surface by a means such as that described as follows.
Cam 20 is affixed to shaft 16 and, as it rotates, moves rocker arm 22
and affixed shield plate 24 up and down. Feeder trough 18 rests on
shield plate 24 and has hinged support 26 at its other end. Thus, the
surface over which a sphere must...