Browse Prior Art Database

Excimer Laser Deposition and Patterning of Metal Organic Inks

IP.com Disclosure Number: IPCOM000121740D
Original Publication Date: 1991-Sep-01
Included in the Prior Art Database: 2005-Apr-03
Document File: 2 page(s) / 69K

Publishing Venue

IBM

Related People

Brady, MJ: AUTHOR [+2]

Abstract

Disclosed is a technique whereby a thin metal film is deposited in air at room temperature on a substrate by means of thermal decomposition of a mixture of metal resinate ink using an Excimer Laser @ 248 nm. Prior art [1,2] provides for laser-driven photo-decomposition of metals using Argon Ion Lasers @ 514.5 nm, and Gallium Arsenide Lasers @ 820 nm [3]. These prior-art techniques require sophisticated optics and precision x-y-z positioning to write patterns. In addition, the optical reflectivity of gold at 514.5 nm is approximately 70% and increases to around 95% at 820 nm.

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Excimer Laser Deposition and Patterning of Metal Organic Inks

      Disclosed is a technique whereby a thin metal film is
deposited in air at room temperature on a substrate by means of
thermal decomposition of a mixture of metal resinate ink using an
Excimer Laser @ 248 nm.  Prior art [1,2] provides for laser-driven
photo-decomposition of metals using Argon Ion Lasers @ 514.5 nm, and
Gallium Arsenide Lasers @ 820 nm [3].  These prior-art techniques
require sophisticated optics and precision x-y-z positioning to write
patterns. In addition, the  optical reflectivity of gold at 514.5 nm
is approximately 70% and increases to around 95% at 820 nm.

      This high reflectivity (lower absorption) limits the thickness
of the gold film that can be formed on a substrate, since the amount
of incident laser energy absorbed decreases. This "self-limiting"
process has the effect of restricting the film thickness formed due
to a decrease in decomposition temperature at the substrate/ink
interface.

      The technique disclosed here takes advantage of the low
reflectivity of numerous metals, such as gold, which is approximately
25% @ 248 nm, thus providing for thicker films, and has the advantage
of being exposed through a metal mask or by projection printing. Note
that an Excimer Laser Projection Printing System is presently on
line, thus making available sub-micron resolution. Metal resinate
inks are available in numerous noble and base solutions, thus
allowing conductors as well as insulators to be formed. Most of the
metal resinate solutions are inter-compatible, allowing blending of
two or more of them together.

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