Browse Prior Art Database

Arm Assembly Transport Mechanism

IP.com Disclosure Number: IPCOM000121746D
Original Publication Date: 1991-Sep-01
Included in the Prior Art Database: 2005-Apr-03
Document File: 4 page(s) / 99K

Publishing Venue

IBM

Related People

Brown, ME: AUTHOR [+2]

Abstract

Described is an arm assembly transport mechanism for transporting greensheet carriers between an airlock and an electron beam (E-beam) drilling chamber. The mechanism is designed to provide contaminant- free operation and to speed up loading/unloading and drilling operations.

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This is the abbreviated version, containing approximately 52% of the total text.

Arm Assembly Transport Mechanism

      Described is an arm assembly transport mechanism for
transporting greensheet carriers between an airlock and an electron
beam (E-beam) drilling chamber.  The mechanism is designed to provide
contaminant- free operation and to speed up loading/unloading and
drilling operations.

      In prior art, greensheet circuit boards were loaded and
unloaded by hand into a fixture and manual operations in the
evacuation and repressurization of an E-beam chamber.  The concept
described herein automates the load/unloading and the
evacuation/repressurization functions so as to decrease the overall
drilling cycle.  The mechanism is designed to transport greensheet
carriers between an airlock and an E-beam drilling chamber without
being degraded by high vacuum, X-rays or debris.

      Fig. 1 shows a side view of the arm assembly transport
mechanism mounted on base assembly 20.  Base assembly 20, carriers 2,
door assembly 21, airlock assembly 22 and chamber assembly 23 are
shown as references in describing how the arm assembly functions and
are not part of the arm assembly mechanism.  Fig. 2 is section A-A of
Fig. 1 and Fig. 3 is section B-B of Fig. 2.  Fig. 3 shows the
arm assembly in the chamber, home and airlock positions.

      The arm assembly is coupled to door assembly 21 (Fig. 1) by two
bellows 6 (Fig. 2).  Carriers 2, as shown in Figs. 1 and 3, are
located on arm 1 by means of locating pins 3 and transported between
airlock assembly 22 an...