Browse Prior Art Database

Shuttle Assembly

IP.com Disclosure Number: IPCOM000121750D
Original Publication Date: 1991-Sep-01
Included in the Prior Art Database: 2005-Apr-03
Document File: 2 page(s) / 53K

Publishing Venue

IBM

Related People

Brown, ME: AUTHOR

Abstract

This article describes a shuttle mechanism to load and unload greensheet carriers into a vacuum chamber for electron beam processing.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 81% of the total text.

Shuttle Assembly

      This article describes a shuttle mechanism to load and
unload greensheet carriers into a vacuum chamber for electron beam
processing.

      The mechanism of this disclosure loads/unloads a two-position
airlock with an arm which would be open also to a robot gripper.

      Figs. 1, 2 and 3 are top, side and front views, respectively,
of the mechanism disclosed herein.  It has an arm 4, which has three
locating pins 3 for holding a carrier 2.  The arm 4 is moved up and
down on carriage 7 on shafts 5 through bearings 6.  The arm 4 is
driven up/down by cylinder 8.  The carriage 7 travels horizontally on
linear bearings 9 on shafts 10.  It is driven by cylinder 11.  The
shafts 10 are bolted to base 12 which is bolted to airlock 1.  A
cable carrier 13 routes cables and tubing from the carriage 7 to the
base 12.  The shuttle loads/unloads carriers 2 in/out of the airlock
1.  The upper position of the airlock 1 is the load position, the
lower is the unload position.  In a typical cycle the shuttle arm 4
starts in the down and retracted position.  A carrier 2 is loaded
onto the arm 4 by hand or by robot.  The shuttle mechanism moves up
and into the airlock 1 upper (load) position.  The carrier 2 is
lifted off the arm 4.  The shuttle mechanism retracts and goes down.
Gate valve 14 closes.  A new carrier 2 is loaded on to the shuttle
arm 4.  The first carrier 2 is processed and returned to the lower
lock position.  The airlock 1 is...