Original Publication Date: 1991-Sep-01
Included in the Prior Art Database: 2005-Apr-03
This article describes a shuttle mechanism to load and unload greensheet carriers into a vacuum chamber for electron beam processing.
describes a shuttle mechanism to load and
unload greensheet carriers into a vacuum chamber for electron beam
of this disclosure loads/unloads a two-position
airlock with an arm which would be open also to a robot gripper.
Figs. 1, 2
and 3 are top, side and front views, respectively,
of the mechanism disclosed herein. It has an arm 4, which has three
locating pins 3 for holding a carrier 2. The arm 4 is moved up and
down on carriage 7 on shafts 5 through bearings 6. The arm 4 is
driven up/down by cylinder 8. The carriage 7 travels horizontally on
linear bearings 9 on shafts 10. It is driven by cylinder 11. The
shafts 10 are bolted to base 12 which is bolted to airlock 1. A
cable carrier 13 routes cables and tubing from the carriage 7 to the
base 12. The shuttle loads/unloads carriers 2 in/out of the airlock
1. The upper position of the airlock 1 is the load position, the
lower is the unload position. In a typical cycle the shuttle arm 4
starts in the down and retracted position. A carrier 2 is loaded
onto the arm 4 by hand or by robot. The shuttle mechanism moves up
and into the airlock 1 upper (load) position. The carrier 2 is
lifted off the arm 4. The shuttle mechanism retracts and goes down.
Gate valve 14 closes. A new carrier 2 is loaded on to the shuttle
arm 4. The first carrier 2 is processed and returned to the lower
lock position. The airlock 1 is...