Browse Prior Art Database

Robotic Mask/ Pellicle End Of Arm Tooling Mechanism

IP.com Disclosure Number: IPCOM000121756D
Original Publication Date: 1991-Sep-01
Included in the Prior Art Database: 2005-Apr-03
Document File: 2 page(s) / 56K

Publishing Venue

IBM

Related People

Harper, BM: AUTHOR [+4]

Abstract

Described is a robotic mask/pellicle end-of-arm tooling mechanism for use with an anthropomorphic robot device. The mechanism consists of a gripper for positioning various mask sizes into a fixture and three different types of pellicle grippers for positioning pellicles onto the masks.

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Robotic Mask/ Pellicle End Of Arm Tooling Mechanism

      Described is a robotic mask/pellicle end-of-arm tooling
mechanism for use with an anthropomorphic robot device.  The
mechanism consists of a gripper for positioning various mask sizes
into a fixture and three different types of pellicle grippers for
positioning pellicles onto the masks.

      The tooling mechanism consists of one mechanical gripper for
positioning masks of different sizes and three vacuum actuated
grippers for manipulating pellicles.  The mask gripper is designed to
randomly access and manipulate various sizes and configurations of
masks into a positioning fixture.  The pellicle grippers are designed
to place pellicles onto the mask in the fixture.  Since the pellicles
are fragile and sensitive to damage, the mechanism is designed to
function without distorting or damaging the mask or pellicles and to
operate within a Class 10 environment.

      The end-of-arm tooling mechanism 10, as shown in Fig. 1, is
connected to a commercially available robotics automatic tool changer
(not shown) so that an assortment of grippers can be used to
manipulate, pick and place various sizes of masks and pellicles.  One
linear gripper 11 can handle mask sizes (not shown) ranging from 3.5"
to 8.0". There are three types of pellicle grippers 12, 13, and, 14
(round, square and Phillips), as shown in the top view in Figs. 2a,
3a and 4a.  Figs. 2b, 3b and 4b are side views of the pellicle
grippers.

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