Browse Prior Art Database

Three Dimensional Optical Waveguide Splitter

IP.com Disclosure Number: IPCOM000121862D
Original Publication Date: 1991-Oct-01
Included in the Prior Art Database: 2005-Apr-03
Document File: 3 page(s) / 246K

Publishing Venue

IBM

Related People

Oprysko, MM: AUTHOR [+2]

Abstract

Disclosed is a method for fabricating three-dimensional (3D) waveguide splitters by machining bevels into waveguides at predetermined depths.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 66% of the total text.

Three Dimensional Optical Waveguide Splitter

      Disclosed is a method for fabricating three-dimensional
(3D) waveguide splitters by machining bevels into waveguides at
predetermined depths.

      In general, optical waveguide splitters are made by dividing
light in the waveguide substrate plane.  Hence, these splitters
divide light in only two dimensions.  Here, the technique of
machining bevels in optical waveguides with excimer laser light is
used to create optical splitters which work in three dimensions.

      Excimer lasers have been used to fabricate (machine) bevels in
polymer waveguides [*].  The same technique was used to create the
bevel in the waveguide shown at the top of Fig. 1.  By underetching
the waveguide, it was discovered that a smooth film of waveguide
material could be left on the substrate.  By further reducing the
etch time additional material was left (third and fourth photos from
the top). The bottom photo depicts a waveguide not exposed to the
excimer light.  Light traveling in a waveguide would be steered up in
the first case, partially transmitted straight through and reflected
in the second case, successively more light would be transmitted in
the third and fourth cases until finally all the light would be
transmitted in the last case.  Fig. 2 is a pictorial representation
of this light "splitting" effect.  Thus, a means for steering
portions of guided light in or out of the waveguide plane, i.e., a 3D
optical splitter,...