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Precise, Clean Gas Mix and Delivery System

IP.com Disclosure Number: IPCOM000122318D
Original Publication Date: 1991-Nov-01
Included in the Prior Art Database: 2005-Apr-04
Document File: 1 page(s) / 63K

Publishing Venue

IBM

Related People

Engelsberg, A: AUTHOR [+2]

Abstract

By means of a pressure monitored mixing and storage volume intermediate between gas sources and reaction chamber of a tool, e.g., plasma or thermal deposition systems, precise control over gas mass ratios is achieved. The system also provides low particulate content in gas delivered to a reaction chamber.

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Precise, Clean Gas Mix and Delivery System

      By means of a pressure monitored mixing and storage volume
intermediate between gas sources and reaction chamber of a tool,
e.g., plasma or thermal deposition systems, precise control over gas
mass ratios is achieved.  The system also provides low particulate
content in gas delivered to a reaction chamber.

      Referring to the figure, gases to be mixed and supplied to tool
reaction chamber 2 are supplied through individual precision gas
regulators R1 and R2 and their respective valves V1 and V2 into
manifold 4.  Before admitting a first gas, manifold 4 and temperature
controlled known volume 6 (inclusive of pressure transducer volume 8)
are evacuated by opening valves V3, V4, and V5 to vacuum source VAC.
Tool reaction chamber 2 is evacuated and valve V6 remains closed. At
the start of operation all valves are closed.

      To begin operation, valve V4 and V1 are opened, and gas G1 is
admitted to the system through pressure regulator R1 until pressure
transducer 8 reaches a predetermined pressure P1, whereupon all
valves are again closed.  Then, valve V3 is opened to evacuate
manifold 4 and then closed.  Next, gas G2 is admitted through its
pressure regulator R2 by opening valve V2, then valve V4 to raise
pressure in control volume 8 to a new predetermined pressure P2 and
again closing valves V4 and V2.  This results in having a mix of
gases G1 and G2 in a precisely controlled mass ratio contained in
volum...