Browse Prior Art Database

Greensheet Carrier for E-Beam Drilling

IP.com Disclosure Number: IPCOM000122366D
Original Publication Date: 1991-Dec-01
Included in the Prior Art Database: 2005-Apr-04
Document File: 2 page(s) / 73K

Publishing Venue

IBM

Related People

Brown, ME: AUTHOR

Abstract

This article describes a pallet device (carrier) to load and unload and accurately position greensheets automatically in an electron beam (E-beam) drilling system for via hole drilling.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 52% of the total text.

Greensheet Carrier for E-Beam Drilling

      This article describes a pallet device (carrier) to load
and unload and accurately position greensheets automatically in an
electron beam (E-beam) drilling system for via hole drilling.

      Fig. 1 is a top view of the carrier disclosed herein. Fig. 2 is
a front view of the carrier.  In operation, the carrier enables via
holes to be drilled into specially prepared greensheets with an E-
beam.  Since this is done in a vacuum, an automated system is
required to increase throughput to an acceptable level.  The
greensheets have a thin sheet of aluminized MYLAR* adhered to the
top.  The aluminum is face up.  A greensheet is loaded onto the
carrier over four aperture pins 5 by hand.  Ground clamp 6 is then
placed on the top of the greensheet.  The carrier is transferred to
the xy stage tooling through an airlock using three locating pins 4
as locators.  Three rest pins 8 are used to locate the carrier on the
xy stage.  On the stage it is clamped in place at the contact 7.  A
voltage is applied to the contact 7, which is wired to pitting plate
2.  The pitting plate 2 is epoxied in place with insulating spacers 3
between it and the base 1.  This electrically isolates the pitting
plate 2 from the base 1.  The pitting plate 2 is at +1000 VDC.  The
base 1 and aluminum on the MYLAR are at O VDC.  The beam is at
+120 KVDC.  This electrostatically clamps the greensheet against the
pitting plate 2 and holds it flat during the drilling process....