Browse Prior Art Database

High Density Integrated Monitor Probe for Membrane Probe Technology

IP.com Disclosure Number: IPCOM000122646D
Original Publication Date: 1991-Dec-01
Included in the Prior Art Database: 2005-Apr-04
Document File: 2 page(s) / 71K

Publishing Venue

IBM

Related People

Franch, RL: AUTHOR [+4]

Abstract

Disclosed is a high-density, high-bandwidth monitor probe that is integrated into the membrane probe fabrication technology.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 59% of the total text.

High Density Integrated Monitor Probe for Membrane Probe Technology

      Disclosed is a high-density, high-bandwidth monitor probe
that is integrated into the membrane probe fabrication technology.

      Current membrane probe cards (1,2) are constructed in a way
that totally covers the chip area with a force delivery backing for
providing the necessary contact force.  This backing prevents probing
of the chip pads with either a fine micro-probe or with an E-beam
tester, so that even the input signals cannot be measured.  This lack
of monitoring ability at the chip pads is a considerable obstacle in
trying to assess risetime, overshoot or other signal quality
parameters that the chip itself sees.

      The monitor probe consists of a nichrome thin film 5K-ohm
resistor connected to the contact bump that is to be monitored.  The
other side of the thin film resistor drives a 50-ohm stripline on the
membrane, as shown in Fig. 1.  The 50-ohm stripline is then
terminated into a 50-ohm oscilloscope amplifier, resulting in a 100:1
probe attenuation, and a 5K-ohm input impedance to the pad being
probed.  The loading from a 5K- ohm input impedance is negligible if
on-chip 50-ohm termination resistors are used for chip input signals.
Bandwidth of several GHz is possible for a monitor probe with this
integrated configuration.  Cost per probe in manufacturing is low
since it is incorporated into the same technology as the membrane
probe itself.

      An impleme...