Browse Prior Art Database

Point of Use Cleaning

IP.com Disclosure Number: IPCOM000122718D
Original Publication Date: 1991-Dec-01
Included in the Prior Art Database: 2005-Apr-04
Document File: 1 page(s) / 50K

Publishing Venue

IBM

Related People

Elenius, P: AUTHOR [+2]

Abstract

Disclosed is a device to clean individual semiconductor chips, thus insuring they are free of contaminants prior to a chip to substrate joining process. This device has various features particularly suitable for a clean room environment.

This text was extracted from an ASCII text file.
This is the abbreviated version, containing approximately 90% of the total text.

Point of Use Cleaning

      Disclosed is a device to clean individual semiconductor chips,
thus insuring they are free of contaminants prior to a chip to
substrate joining process.  This device has various features
particularly suitable for a clean room environment.

      In its most preferred embodiment, the point of use cleaning
device is designed to be used in an auto mode chip placement tool,
without increasing process time.

      As illustrated in the figure, the device has two pneumatic
ports, one port 13 for filtered compressed nitrogen, the other port
15 for vacuum.  The filtered compressed nitrogen travels through a
series of veins 17 within the device, then through to internal
manifolds 19. The nitrogen is delivered to the chip C4 pads 20, via a
series of .010" diameter jets 21 (15 per side, at 20 and 30 degree
angles) from the manifold 19.  The recommended nitrogen pressure is
at 10psi, and at 25cfm.    The removed contaminants 23 are captured
into a lower bowl 25. A venturi vacuum effect caused by a series of
internal via holes in the lower bowl 25 is designed to capture all
contaminants. A series of vacuum veins 26 provides the vacuum to the
via holes.  The recommended vacuum pressure is 20hg at 15cfm. After
the device passes the chip 20 to its position above the jets 21 by a
vacuum probe 27, the cleaning procedure is initiated.

      This technique is useful to any automated or semi-manual chip
placement tool.  As contaminants are a ...