Browse Prior Art Database

Device for Automatically Counting the Wafers in a Jig

IP.com Disclosure Number: IPCOM000122916D
Original Publication Date: 1998-Jan-01
Included in the Prior Art Database: 2005-Apr-04
Document File: 2 page(s) / 57K

Publishing Venue

IBM

Related People

Pain, J: AUTHOR

Abstract

Wafer handling often requires the exact determination of the number of wafers stored in a jig, in particular, to avoid misprocessing errors, wafer breakage and the like.

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This is the abbreviated version, containing approximately 100% of the total text.

Device for Automatically Counting the Wafers in a Jig

      Wafer handling often requires the exact determination of the
number of wafers stored in a jig, in particular, to avoid
misprocessing errors, wafer breakage and the like.

      The device shown in the Figure provides a reliable and
automatic counting of the wafer quantity in a small footprint.  The
device basically consists of a bar-shaped array of photocells, one
cell per wafer slot.  The jig is locked against this device and the
number of  wafers is instantaneously computed.  The total number of
wafers is then  displayed on a screen to the operator's attention.