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Protection Devices of Air Mix Chemical Supply Line

IP.com Disclosure Number: IPCOM000122944D
Original Publication Date: 1998-Jan-01
Included in the Prior Art Database: 2005-Apr-04
Document File: 4 page(s) / 57K

Publishing Venue

IBM

Related People

Tanaka, H: AUTHOR

Abstract

Disclosed is a new chemical supply device which avoids air mix during chemical bottle changes. Using this device contributes to resist-saving by the elimination of the air evacuation process. Figs. 1 through 3 show the normal bottle-change process. Fig. 1 shows the bottle inside just before it changes. The chemicals containing air flows back into the pipe line. Fig. 2 shows the bottle inside just after the bottle changes. The pipe line contains air. Fig. 3 shows how to purge the air contained in the pipe line. The bottle is pressurized using another nozzle, and the chemicals inside the pipe are purged by opening the other side nozzle in the filter.

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Protection Devices of Air Mix Chemical Supply Line

      Disclosed is a new chemical supply device which avoids air mix
during chemical bottle changes.  Using this device contributes to
resist-saving by the elimination of the air evacuation process.
Figs. 1 through 3 show the normal bottle-change process.  Fig. 1
shows the bottle  inside just before it changes.  The chemicals
containing air flows back  into the pipe line.  Fig. 2 shows the
bottle inside just after the bottle  changes.  The pipe line contains
air.  Fig. 3 shows how to purge the air  contained in the pipe line.
The bottle is pressurized using another nozzle, and the chemicals
inside the pipe are purged by opening the other  side nozzle in the
filter.

      The results are to throw out the chemicals in the pipe
line.  Fig. 4 shows the new devices, which adapt to the end of the
pipe line.  The devices have some holes, the diameters of which are 1
mm.  Using this device, the chemical back-flows can be avoided during
the bottle changes.  The results are to eliminate the purge process
and save the chemicals during bottle changes.