One Resist Layer with Several Functions using Different Thicknesses in Pearl-less LCD
Original Publication Date: 1998-May-01
Included in the Prior Art Database: 2005-Apr-04
Koseki, T: AUTHOR [+2]
Disclosed is a resist layer structure which has several functions, such as a stud layer, a through-hole and a passivation layer, using different thicknesses.
One Resist Layer with Several Functions using Different
in Pearl-less LCD
Disclosed is a
resist layer structure which has
several functions, such as a stud layer, a through-hole and a
passivation layer, using different thicknesses.
conventional pearl-less cell process,
the stud replacing a spacer ball is made from transparent
photo-sensitive resin after the array process. The cell process does
not need a conventional spacer ball dispersion process. However a
the stud patterning process is more difficult than the dispersion
process in general, so that total process steps of pearl-less cell
process increase more than those of conventional one. In this novel
pearl-less LCD, the transparent resin layer has thickness of 4.0
microsecondm to 6.0 microsecondm on a glass substrate, such as a
array substrate or a color filter substrate. This thick layer is
not suitable as a passivation layer because of reverse tilt domain.
Several steps in exposure-developing process are possible for
posi-type resist. The exposure energy can be controlled in order to
remove the desired resin thickness with several sets of exposure mask
patterns. A final exposure is done to remove the whole resin for
through-hole patterning. Therefore, it is possible to make one
resist layer with different thickness. For example, the thickest
part has a function of stud, and the removed part has a function of
through hole. The others have desired functions with diff...