Browse Prior Art Database

Production Output Control System for Semiconductor Manufacturing

IP.com Disclosure Number: IPCOM000123118D
Original Publication Date: 1998-May-01
Included in the Prior Art Database: 2005-Apr-04
Document File: 3 page(s) / 190K

Publishing Venue

IBM

Related People

Ozawa, K: AUTHOR

Abstract

Disclosed is a production output control system for semiconductor manufacturing which supports a dispatch of process lots by operator and make a smooth process lot flow.

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This is the abbreviated version, containing approximately 96% of the total text.

Production Output Control System for Semiconductor Manufacturing

   Disclosed is a production output control system for
semiconductor manufacturing which supports a dispatch of process lots
by operator and make a smooth process lot flow.

   This system supports the operator to select the lot with
highest priority from easy chart information in clean room.  With
semiconductor manufacturing there are many process and technology
operation in one tool-group.  Next lot selection has the relation
with lot progress, lot output count of the tool-group and lot
priority.  Operator needs a simple lot selection system which has
the whole information about one tool-group in clean room.

   Fig. 1 shows this system overview.  From the manufacturing
or engineering office the staff operator keys in today's output
target to process control database.  With these target data and
process lot data from the floor control system the main program draw
the information chart for clean room operator every 30 minutes.  In
clean room operator can use this information chart for selection of
next operation.  And the staff operator can change the output target
timely from their office computer.

   Fig. 2 is the main menu panel of the information
chart.  Operator can select their own tool-group from this panel.

   Fig. 3 is the information chart.  Each bar shows the
output lot count, in-process lot count and wip lot count by process.
0Line shows the today's output target.  And the system...