Browse Prior Art Database

Apparatus for Moving a Large Sample being Examined by Scanning Probe Microscope

IP.com Disclosure Number: IPCOM000123219D
Original Publication Date: 1998-Jul-01
Included in the Prior Art Database: 2005-Apr-04
Document File: 2 page(s) / 71K

Publishing Venue

IBM

Related People

Brown, RE: AUTHOR [+4]

Abstract

Disclosed is apparatus for providing horizontal movement, in X- and Y-directions, of a sample being examined through scanning probe microscopy, while preventing vertical movement of the sample.

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This is the abbreviated version, containing approximately 70% of the total text.

Apparatus for Moving a Large Sample being Examined by Scanning Probe
Microscope

   Disclosed is apparatus for providing horizontal movement,
in X- and Y-directions, of a sample being examined through scanning
probe microscopy, while preventing vertical movement of the sample.

   The figure is an isometric view of this apparatus.  The
sample (not shown) is fastened to a vacuum chuck 1 on the top
surface of a sample stage 2.  While the vacuum chuck may be of
various shapes, in this example it is round for accommodating
circular disks to be measured.  The sample stage 2 rides along upper
surface 3 of a granite block 4, being supported by an air bearing 5
near each corner of a lower surface of the sample stage 2.  The
granite block 4 is manufactured with an extremely flat upper surface
3, so that vertical movement of the sample stage 2 is restricted.

   The sample stage 2 is mounted to move in the Y-direction
along a forward extending leg 6 of a "T"-shaped carriage 7, with the
alignment of the sample stage being maintained by linear bearings 8
mounted within the sample stage 2 moving along guide rails 9 mounted
within the carriage 7.  This movement of the sample stage 2 is caused
by the rotation of a leadscrew 10 by means of a drive motor 11.  The
leadscrew 10, which is rotatably mounted in the carriage 7 by means
of  bearings 12, engages the sample stage 2 by means of a drive nut
13 mounted in the sample stage 2.

   The carriage 7 is mounted to move in the X-dire...