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Browse Prior Art Database

Photomasks Stand up Packaging

IP.com Disclosure Number: IPCOM000123614D
Original Publication Date: 1999-Feb-01
Included in the Prior Art Database: 2005-Apr-05
Document File: 1 page(s) / 23K

Publishing Venue

IBM

Related People

Dejaune, P: AUTHOR

Abstract

Disclosed is a new packaging for chrome photomasks used in the microelectronics industry. This is a stand-up photomasks box, which is able to hold 5/6-inches photomasks in a vertical position and is compatible with several plate sizes and thicknesses (90 to 250 mils).

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Photomasks Stand up Packaging

   Disclosed is a new packaging for chrome photomasks used in
the microelectronics industry.  This is a stand-up photomasks box,
which is able to hold 5/6-inches photomasks in a vertical position
and is compatible with several plate sizes and thicknesses (90 to
250 mils).

   This photomask packaging is made of three parts which are :
      - an antistatic black box to reduce particle contamination;
      - a carrier for resin coated 6-inches photomasks (blanks)
        sold by HOYA CORP; and,
      - special kits that have been created to adapt the carrier
        for reticle holding.

   When carriers are used for 6-inches blanks, the kits are
designed to be able to also hold reticles (5-inches).  As a result,
this packaging is compatible with blanks and processed photomasks
with or without pellicles.  The packaging is also adapted to handle
photomasks of either 5 or 6 inches able to be handled with many masks
picks.