Browse Prior Art Database

Desk Top Wafer Cassette Load and Unload Method

IP.com Disclosure Number: IPCOM000123702D
Original Publication Date: 1999-Mar-01
Included in the Prior Art Database: 2005-Apr-05
Document File: 2 page(s) / 37K

Publishing Venue

IBM

Related People

Nakamura, T: AUTHOR [+3]

Abstract

Disclosure is a method for "load and unload" of Si wafer carrier from wafer carrier case ergonomically. Conventional method requires a manual operation (operator) to load wafer carrier case for high position and to take out the wafer carrier from low position. The new method enables the operator to load wafer carrier case and to take out wafer carrier at the same height position.

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Desk Top Wafer Cassette Load and Unload Method

   Disclosure is a method for "load and unload" of Si wafer
carrier from wafer carrier case ergonomically.  Conventional method
requires a manual operation (operator) to load wafer carrier case for
high position and to take out the wafer carrier from low position.
The new method enables the operator to load wafer carrier case and to
take out wafer carrier at the same height position.

   The conventional method illustrated on Fig.1 and
Fig.2.  Fig.1 and Fig.2 shows the wafer carrier case loading
position and the wafer carrier take out position, respectively.  The
wafer carrier is unloaded from the wafer carrier case by lowering
wafer carrier bottom plate.  To lower the bottom plate, the wafer
carrier case need to be loaded high enough from table.  This high
loading position is stressful for the operator.

   The new method is shown in Fig.3 and Fig.4.  Fig.3 shows
the wafer carrier case loading position.  The wafer carrier case is
loaded at any height for the operator to load easily.  The wafer
carrier case is raised and the wafer carrier stays at the same
position as illustrated in Fig.4.  As the wafer carrier stays at the
same height position as it was loaded, the wafer carrier is easily
taken out ergonomically.