Browse Prior Art Database

Surface Inspection Apparatus

IP.com Disclosure Number: IPCOM000123730D
Original Publication Date: 1999-Apr-01
Included in the Prior Art Database: 2005-Apr-05
Document File: 1 page(s) / 31K

Publishing Venue

IBM

Related People

Hayashi, R: AUTHOR

Abstract

Disclosed is a surface inspection apparatus for observing both macroscopic undulation and microscopic bump on the surface of the samples in identical area.

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Surface Inspection Apparatus

    Disclosed is a surface inspection apparatus for observing
both macroscopic undulation and microscopic bump on the surface of
the samples in identical area.

   Our apparatus consists of one sample stage and two
different observation heads.

   One head is the optical microscopic head which has several
objective lens with different magnifications, Nomarski filter/prism.
It works as an optical microscope and bright field observation, dark
field observation, Nomarski observation are available.  This head is
used for observing the macroscopic undulation.  The other head is the
STM (Scanning Tunneling Microscope) head.

   It is used for microscopic bump observation.

   One sample stage exists for the two observation
heads.  The sample stage moves between optical microscope head and
STM head with linear slider.

   At first, the sample is put on the stage, and it is moved
under the optical head.  The optical microscopic observation is done
here.  Then the stage moves to the position under STM head.  The
optical head and STM head are exactly aligned, so STM prove engages
onto the same point which is the observation point of optical
microscope.  It is possible to take STM image at the same point which
optical microscopic observation is done.