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A Multi-Functional Polyhydroxystyrene Homo-Polymer for EUV Photo Resists

IP.com Disclosure Number: IPCOM000124191D
Publication Date: 2005-Apr-11
Document File: 2 page(s) / 15K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method for a photo resist based on a homo-polymer of hydroxystyrene, with multiple chemical functional groups attached to each styrene monomer. Benefits include reducing line width roughness, decreasing defect rates, and improving resolution.

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A Multi-Functional Polyhydroxystyrene Homo-Polymer for EUV Photo Resists

Disclosed is a method for a photo resist based on a homo-polymer of hydroxystyrene, with multiple chemical functional groups attached to each styrene monomer. Benefits include reducing line width roughness, decreasing defect rates, and improving resolution.

Background

Photo resist resin manufacturers primarily use one-pot synthesis methods. This results in relatively non-uniform polymer structures (see Figure 1), which limit improvements in line edge roughness and lead to relatively high defect rates. Some manufacturing companies are starting to use advanced synthesis techniques (e.g. controlling the reactant feed rates to reactors), but use of these techniques is limited and will never achieve perfect resin homogeneity.

Non-homogenous resist polymers can cause resist line edge roughness, nubs (i.e. defects), and a limited resist resolution.

General Description

The disclosed method consists of a polystyrene resist with multiple functional groups that are synthesized as a homo-polymer with controlled architectures to maximize lithographic performance. Because it is a homo-polymer, it is very easy to control polymer properties such as homogeneity, molecular weight, and poly dispersity. In contrast, copolymers, terpolymers, or tetrapolymers, have different reactive ratios for each monomer. Therefore, they typically form blocky polymers which results in defects, LWR, and a reduced resolution. Homo-polymers permit greater control over the architecture of the polymer resin. They also allow narrow mole...