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Electrical Process and Method of Producing and Using Trisilane

IP.com Disclosure Number: IPCOM000124826D
Publication Date: 2005-May-09
Document File: 7 page(s) / 47K

Publishing Venue

The IP.com Prior Art Database

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ELECTRICAL PROCESS AND METHOD OF

PRODUCING AND USING TRISILANE

BACKGROUND:

Methods of producing Silane and Disilane are relatively well known.  There are some documented references involving the production of Trisilane.  However, to date, none of the previously known methods of producing and recovering pure Trisilane are economical because the production yields are typically very low and the separation of co-produced materials (due to unwanted side reactions) is costly.  Many have proposed solutions, including the disclosures of the following

U.S.

patents and published applications:

SUMMARY OF THE INVENTION:

This invention disclosure concerns an electrical process and method of producing and using Trisilane (Si3H8).  The process involves treating either pure Silane or a mixture of gaseous Silane (SiH4) and other gases between two electrodes in a corona discharge device [also called a silent electrical discharge (SED) device].  This process is capable of producing “higher” Silanes such as Disilane (in relatively high concentrations) and Trisilane at lower concentrations.  Control over the Silane reactant concentration employed during this process, the overall gas flow rates through the SED device, and controlling the electrical power input during operation are all important aspects of this process.  However, the most important aspect of this invention is the direct use of the Trisilane (Si3H8) produced by this process without resorting to separating it from the original reactants or other products that are simultaneously produced.

DETAILED DESCRIPTION OF THE INVENTION:

This invention disclosure concerns an electrical process and method of producing and using Trisilane (Si3H8).  The process involves treating either pure Silane or a mixture of gaseous Silane (SiH4) and other gases between two electrodes in a corona discharge device [also called a silent electrical discharge (SED) device].  This process is capable of producing “higher” Silanes such as Disilane (in relatively high concentrations) and Trisilane at lower concentrations.  Control over the Silane reactant concentration employed during this process, the overall gas flow rates through the SED device, and controlling the electrical power input during operation are all important aspects of this process.  However, the most important aspect of this invention is the direct use of the Trisilane (Si3H8) produced by this process without resorting to separating it from the original reactants or other products that are simultaneously produced.

The object of the present disclosure is to describe a useful, economical, and efficient process and method of producing and using Trisilane that contains none of the disadvantages of previously disclosed techniques.  This method involves producing Trisilane within the space between two electrodes in a corona discharge [SED] device.  A schematic view of a unique and efficient SED device that may be advantageously used for this purpose ma...