Browse Prior Art Database

6 Degree of Freedom Tri-Stage Micro-Positioner

IP.com Disclosure Number: IPCOM000125627D
Original Publication Date: 2002-Apr-12
Included in the Prior Art Database: 2005-Jun-09
Document File: 2 page(s) / 20K

Publishing Venue

National Institute of Standards and Technology

Related People

Nicholas G. Dagalakis: INVENTOR [+2]

Abstract

The 6-Degree of Freedom Tri-Stage Micro Positioner (6DFTSMP) can generate high accuracy, small displacement, and high-resolution motions. The moving platform of the device has six degrees (6-D) of freedom motions (translation and rotation about three orthogonal axes, X-Y-Z). The 6DFTSMP is unique because it derives its input motion from a monolithic tri-stage base plate and has struts that may have specially designed flexures. The 6DFTSMP capitalizes on the availability of inexpensive high quality planar micro-positioning stages for the control of its moving platform. Because the struts, which connect the planar micro positioning stages with the moving platform are oriented in a parallel mechanism fashion the in-plane motion of the stages is converted into a translation and rotation about three orthogonal axes. Two experimental prototypes of the 6DFTSMP have been built and various mathematical models have been developed. A micro-position and orientation measurement sensor nest was designed and built to test various calibration and performance testing methods for this type of micro-positioner.

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6 Degree of Freedom Tri-Stage Micro-Positioner

  Nicholas G. Dagalakis, Edward Amatucci National Institute of Standards and Technology Gaithersburg, Maryland 20899

Abstract

  The 6-Degree of Freedom Tri-Stage Micro Positioner (6DFTSMP) can generate high accuracy, small displacement, and high-resolution motions. The moving platform of the device has six degrees (6-D) of freedom motions (translation and rotation about three orthogonal axes, X-Y-Z). The 6DFTSMP is unique because it derives its input motion from a monolithic tri-stage base plate and has struts that may have specially designed flexures. The 6DFTSMP capitalizes on the availability of inexpensive high quality planar micro-positioning stages for the control of its moving platform. Because the struts, which connect the planar micro positioning stages with the moving platform are oriented in a parallel mechanism fashion the in-plane motion of the stages is converted into a translation and rotation about three orthogonal axes. Two experimental prototypes of the 6DFTSMP have been built and various mathematical models have been developed. A micro-position and orientation measurement sensor nest was designed and built to test various calibration and performance testing methods for this type of micro-positioner.

Brief Description of the Device

                             Figure 1 shows a schematic drawing of the 6DFTSMP with struts, which have flexures at both attachment points. The device consists of a base plate, six struts and a moving platform. The base plate is equipped with three X-Y micro positioning stages. Each of these stages is capable of generating motion in two orthogonal directions. The range of these motions depends on the design and size of these stages. The moving plate of each X-Y...