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Parallel Cantilever Biaxial Micro-Positioner

IP.com Disclosure Number: IPCOM000125643D
Original Publication Date: 2002-Apr-12
Included in the Prior Art Database: 2005-Jun-09
Document File: 3 page(s) / 52K

Publishing Venue

National Institute of Standards and Technology

Related People

Edward Amatucci: INVENTOR [+4]

Abstract

The Parallel Cantilever Biaxial Micro-Positioner (PCBMP) has a novel configuration and design in that it has two parallel sets of cantilever beam flexures. This design reduces crosstalk in the X and Y translations and creates motions that are more linear and independent from each other in the X and Y directions.

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Parallel Cantilever Biaxial Micro-Positioner

Edward Amatucci, Nicholas G. Dagalakis, John A. Kramar, and Fredric E. Scire National Institute of Standards and Technology

Gaithersburg, Maryland 20899

Abstract

The Parallel Cantilever Biaxial Micro-Positioner (PCBMP) has a novel configuration and design in that it has two parallel sets of cantilever beam flexures. This design reduces crosstalk in the X and Y translations and creates motions that are more linear and independent from each other in the X and Y directions. The PCBMP comes in two flavors, which are explained in this brief paper.

Brief Description of the Device

1 Straight Cantilever

Fig. 1 shows a schematic drawing of the micro-positioner mechanism. Only the Y-axis motion mechanism is shown for clarity. The input displacement is generated by the actuator (AC) and transmitted to the moving stage (MS) through flexures a1 and a2 of levers A1 and A2, respectively. These levers pivot about flexures b1 and b2, transmitting the actuator force to the moving stage through flexures c1 and c2. If not further constrained, due to the pivoting action, the attachment points of flexures c1 and c2 would generate arcuate motion. However, these arcs operate symmetrically on a rigid body. We therefore expect balanced elastic deformation, finally resulting in the approximate cancellation of the parasitic cross-axis motion. Levers A1t and A2t similarly constrain the other end of this stage of motion.

2 Folding Cantilever

Figure 2 shows an alternative design of the PCBMP. Again only the Y axis motion mechanism is shown for clarity. In the new design the levers are broken into two segments, lever "Ai" and lever "Bi" (see Fig. 2), where i = 1 or 2. Lever "Ai" pivots about flexure "ai" and lever "Bi" about flexure "bi". If the gain of lever "Ai" is GAi and the gain of lever "Bi" is GBi and since lever "Ai" and "Bi" are connected in series the total lever gain should be Gi = GAi x GBi. The total lever gain can be the same as that of the straight

         b2t b1t

a2

c1t c2t

b1 b2

Y

AC

X

H1y H2y

a1

c1

c2

L1y L2y

A1t

A2t

MS

A1

A2

Wy

Figure 1. Schematic drawing of the PCBMP Y- axis motion mechanism.

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lever micro-positioner design, but the lever "Ai"

length is now only Ni =

(GAi+1)Hi instead of (Gi+1) Hi of the straig...