Browse Prior Art Database

Spectral flattening filter for semiconductor metrology

IP.com Disclosure Number: IPCOM000126264D
Publication Date: 2005-Jul-11

Publishing Venue

The IP.com Prior Art Database

Abstract

An optical filter for broadband light sources includes a first polarizer followed by a waveplate, a rotator and a second polarizer. The combination of these elements, when correctly selected and positioned provides an effective mechanism for reducing the dynammic range of the output of deuterium light sources.

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 100% of the total text.

Page 1 of 11

[This page contains 1 picture or other non-text object]

Page 2 of 11

[This page contains 1 picture or other non-text object]

Page 3 of 11

[This page contains 1 picture or other non-text object]

Page 4 of 11

[This page contains 1 picture or other non-text object]

Page 5 of 11

[This page contains 1 picture or other non-text object]

Page 6 of 11

[This page contains 1 picture or other non-text object]

Page 7 of 11

[This page contains 1 picture or other non-text object]

Page 8 of 11

[This page contains 1 picture or other non-text object]

Page 9 of 11

[This page contains 1 picture or other non-text object]

Page 10 of 11

[This page contains 1 picture or other non-text object]

Page 11 of 11

[This page contains 1 picture or other non-text object]