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EUV Source Optical Alignment Mechanism

IP.com Disclosure Number: IPCOM000126395D
Publication Date: 2005-Jul-14
Document File: 2 page(s) / 2M

Publishing Venue

The IP.com Prior Art Database

Related People

William C. Cray: ATTORNEY

Abstract

The invention described within provides for both coarse nominal vessel placement/ alignment and fine (sub-micron) manipulation to compensate for dynamic effects. All components are mounted external to the vacuum environment. Allows multiple orientations to suit specific customer requirements. Unlike the traditional hexapod however, the orthogonal mechanism provides unencumbered access to the source vessel for servicing. The pivoting feature on the orthogonal mechanism also provides for multiple vessel orientations, not possible with the hexapod approach. Linear motorized actuators are available from multiple sources including: Parker, IDC, Tolomatic, and Exlar. Manufacturers typically offer both stepper and servo motor configurations. Position resolution is determined by pitch of the leadscrew/ballscrew (typically .20" per revolution) in combination with motor resolution. 1.8 degree stepper motors are routinely micro-stepped to 50,000 step count per revolution. Such a combination offers a commanded* position resolution of 4 micro-inches. Servo motor resolution is determined by line count and interpolation electronics within the rotary encoder attached to the motor. Positional feedback of any linear mechanism can be acquired using scales. Compact models offered by Renishaw provide resolutions down to 5nm. Common commercially available linear actuators are typically employed to move a guided load. The actuators are not renowned for their axial stiffness. However, using the actuators under tension negates the need for supplemental guide mechanics. It also eliminates concerns regarding backlash within the actuator mechanics. EUV light sources are apt to be >3000lbs. Linear actuators with thrusts greater than 7000lb are commonly available. However, counterbalancing the mass of the EUV source via springs (pneumatic or mechanical) allows the use of lower capacity actuators, lower torque motors, and lower power motor drive electronics.

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TITLE:

EUV Source Optical Alignment Mechanism

B.                 Purpose and advantage of invention:

The invention described within provides for both coarse nominal vessel placement/alignment and fine (sub-micron) manipulation to compensate for dynamic effects.

All components are mounted external to the vacuum environment.

Allows multiple orientations to suit specific customer requirements

C.                 Short description of invention (Include or attach appropriate sketches, and point out novel features):

Adjustable links in the mechanism are comprised of motorized linear actuators with spherical bearing rod ends.

The mechanism uses 6 links and offers 6 degrees of freedom. Although only 5 DOF’s are required for source alignment, 6 links are still required. In essence the mechanism is an orthogonal version of a Stewart platform (aka hexapod).

Unlike the traditional hexapod however, the orthogonal mechanism provides unencumbered access to the source vessel for servicing. The pivoting feature on the orthogonal mechanism also provides for multiple vessel orientations, not possible with the hexapod approach.

Linear motorized actuators are available from multiple sources including: Parker, IDC, Tolomatic, and Exlar. Manufacturers typically offer both stepper and servo motor configurations. Position resolution is determined by pitch of the leadscrew/ballscrew (typically .20” per revolution) in combination with motor resolution. 1.8 degree stepper motors are routinely micro-stepped to 50,000 step count per revolution. Such a combination of...