Browse Prior Art Database

Performance measurements of MEMS analysis system

IP.com Disclosure Number: IPCOM000128125D
Original Publication Date: 1999-Dec-31
Included in the Prior Art Database: 2005-Sep-15
Document File: 4 page(s) / 17K

Publishing Venue

Software Patent Institute

Related People

Ramon L. Rodriguez: AUTHOR [+3]

Related Documents

http://theses.mit.edu:80/Dienst/UI/2.0/Describe/0018.mit.theses/1999-57: URL

Abstract

Designers and manufacturers of Micro Electromechanical Systems need accurate instruments to examine the mechanical properties of the devices they fabricate. The research presented in this thesis evaluate's the motion detection capabilities of a MEMS Analysis System. The thesis describes two motion detection schemes a ad the experiments that have been carried out to characterize them. It provides detailed analysis of the results, as well as suggestions as to how to improve each method. Most importantly, however, it establishes a framework in which future performance tests can be based on.

This text was extracted from a PDF file.
This is the abbreviated version, containing approximately 40% of the total text.

Page 1 of 4

 This record is the front matter from a document that appears on a server at MIT and is used through permission from MIT. See http://theses.mit.edu:80/Dienst/UI/2.0/Describe/0018.mit.theses/1999-57 for copyright details and for the full document in image form.

Performance Measurements of MEMS Analysis System

by

Ramon L. Rodriguez
Submitted in partial fulfillment of the requirements for the degree of Master of Engineering at the Massachusetts Institute of Technology
June 30, 1999
The author hereby grants to M.I.T. permission to reproduce and distribute publicly paper and electronic copies of this thesis and. to grant others the right to do so.

SIGNATURE OF author: [[signature omitted]]

Electrical Engineering and Computer Science

June 30, 1999

CERTIFIED BY: [[SIGNATURE OMITTED]]

Donald E. Troxel Professor of Electrical Engineering Department of Electrical Engineering and Computer Science Thesis Supervisor
ACCEPTED BY: [[SIGNATURE OMITTED]]

Arthur C. Smith Chairman, Department Committee on Graduate Theses ARCHIVES MASSACHUSETTS INSTITUTE OF TECHNOLOGY LIBRARIES JUL 15 1999

Massachusetts Institute of Technology Page 1 Dec 31, 1999

Page 2 of 4

Performance measurements of MEMS analysis system

Performance Measurements of MEMS Analysis System

by

Ramon L. Rodriguez

Submitted to the Department of Electrical Engineering and Computer Science in June 30, 1999, in partial fulfillment of the requirements for the degree of Master of Engineering in Electrical Engineering.

Abstract

Designers and manufacturers of Micro Electromechanical Systems need accurate instruments to examine the mechanical properties of the devices they fabricate. The research presented in this thesis evaluate's the motion detection capabilities of a MEMS Analysis System. The thesis describes two motion detection schemes a ad the experiments that have been carried out to characterize them. It provides detailed analysis of the results, as well as suggestions as to how to improve each method. Most importantly, however, it establishes a framework in which future performance tests can be based on.

Thesis Supervisor: Donald E. Troxel Title: Professor of Electrical Engineering

Acknowledgments

I owe the completion of this thesis to a large number of people. First of all, I would like to express my gratitude to all the people at the Cognitive Information Processing Group. In particular, I would like to thank my supervisor Prof. Donald E. Troxel, who has been my mentor and ally for the last two years. Thank you very much for funding my graduate education! I would also like to thank my peers at MEMS-4, Danny Seth and Xudong Tang, as well as former peer Erik Pedersen, for making my time at the office truly enjoyable. Thanks also to Dr. Werner Hemmert for his technical advice. Outside of RLE, I would like thank Prof. Mildred S. Dresselhaus, who has been a devoted advisor and source of inspiration for the last four years. In the Department Headquarters, I would like to recognize Anne Hunter...