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Method for a polishing head install lift

IP.com Disclosure Number: IPCOM000131869D
Publication Date: 2005-Nov-21
Document File: 2 page(s) / 15K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method for a polishing head install lift. Benefits include improved functionality, improved performance, improved ergonomics, and improved safety.

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Method for a polishing head install lift

Disclosed is a method for a polishing head install lift. Benefits include improved functionality, improved performance, improved ergonomics, and improved safety.

Background

              Conventional polishing heads are installed by initiating air pressure to a mounting flange, manually raising the polishing head, and mating the flanges. When the seal is secure, the polishing head inflates, (drives the polish head down onto the platen and the flanges together. The technician then applies a ring clamp to secure it).

              The conventional method has some safety issues and drawbacks. Ergonomics can affect the technician. Back injury can be caused by motions required to install a polishing head. The technician must bend at the waist, extend his/her arms forward and lift the 35-pound polishing head, abutting it against a mounting flange and positioning it. When the seal is secure, the pressure and weight of the polishing head combine to form 82 pounds of force driving the polishing head into the platen. Gloves and fingers can become pinched.

              An alternate solution is a pneumatic lift for 8-inch polishing heads. It uses rubber tubing inflated between two thin metal plates by a sphygmomanometer hand pump. Pressure is relieved by opening a valve after the clamp is applied. However, the apparatus cannot be used at the pressure required to ensure a successful seal.

              Another solution is a lever for lifting the polishing-head flange without lifting the polishing head. However, the polishing head is difficult to maneuver and requires the tool be energized.

              A solution is required that installs the polishing head with the equipment deenergized. No such conventional solution exists.

Description

              The disclosed method is a polishing head install lift. It is made of thick (~1.2-mm) biaxially-oriented polyethylene terephthalate film. The lift is a large round flat pad that is 16-inches in diameter, ~2.5-mm thick, and has two film layers. They are sealed around the circumfere...