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Method for a roller arm with fluid roll off for scrubbers

IP.com Disclosure Number: IPCOM000132321D
Publication Date: 2005-Dec-07
Document File: 1 page(s) / 37K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method for roller arm with fluid roll off for scrubbers. Benefits include improved functionality, improved reliability, and improved cost effectiveness.

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Method for a roller arm with fluid roll off for scrubbers

Disclosed is a method for roller arm with fluid roll off for scrubbers. Benefits include improved functionality, improved reliability, and improved cost effectiveness.

Background

              Conventional roller arms in scrubber brush boxes are composed of anodized aluminum. They corrode easily in the wafer environment causing particles to be sprayed on the wafers. Additionally, these roller arms trap water that flows through the roller shaft to a motor that is located under the tool, prematurely wearing out the motor and causing it to fail.

      Replacing the roller arms when they are corroding and/or replacing the geared motor under the arm is the conventional solution to this problem.

Description

              The disclosed method includes a plastic roller arm. The top of the roller arm slants to divert water from collecting and dripping on the geared motor under the arm. The roller arms do not cause particles to be deposited on the backside of wafers.

      The arm is comprised of two pieces, a top piece and a bottom piece, joined together with a screw.

Advantages

              The disclosed method provides advantages, including:
•             Improved functionality due to diverting water from dripping on a geared motor

•             Improved reliability due to preventing particle transfer to the backside of wafers

•             Improved cost effectiveness due to saving the time and cost required to replace the ro...