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Multiple and Simultaneous X-Section Polishing

IP.com Disclosure Number: IPCOM000132326D
Publication Date: 2005-Dec-07
Document File: 3 page(s) / 131K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method for x-section polishing which can finely polish 10 units of Flash product with different height requirements automatically and simultaneously. Benefits include eliminating the safety and ergonomic issues associated with x-section polishing.

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Multiple and Simultaneous X-Section Polishing

Disclosed is a method for x-section polishing which can finely polish 10 units of Flash product with different height requirements automatically and simultaneously. Benefits include eliminating the safety and ergonomic issues associated with x-section polishing.

Background

The x-section is a process widely used for failure analysis in the semiconductor industry, especially in the development of Flash products. The shortest throughput time and highest quality are preferred. Currently for the x-section process, operators or technicians must hold the unit with their own hands, and only one unit can be polished at a time. This approach has following problems:

§         Low productivity. The usual throughput time for the fine Flash unit polish is at least 30 minutes, with at most 16 units per working day.

§         Safety issues. There is a high probability of physical injury, because the technician’s hands are very close to the high speed rotating polishing plate.

§         Ergonomic issues. The extended time needed to hold the product may cause fatigue and physical injury.

General Description

The disclosed method automatically and simultaneously polishes 10 units of Flash product with different height requirements. The disclosed method is adapted to the high-volume x-section process, with a low surface requirement. The disclosed method contains a novel designed fixture to meet different height requirements, and to act as a molding chamber. Figure 1 shows the detailed structure of the fixture and the Flash product unit loadi...