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Integration of Thermally Stable, Electrically Conducting Metal Oxide Nanocrystals into the CMOS Process for Charge-Storage Applications

IP.com Disclosure Number: IPCOM000132329D
Publication Date: 2005-Dec-07
Document File: 2 page(s) / 40K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method that substitutes certain conductive elements in a CMOS device with thermally stable, electronically conducting metal oxide nanocrystals. Benefits include a solution that is more thermodynamically stable, and permits greater flexibility when processing dielectrics.

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Integration of Thermally Stable, Electrically Conducting Metal Oxide Nanocrystals into the CMOS Process for Charge-Storage Applications

Disclosed is a method that substitutes certain conductive elements in a CMOS device with thermally stable, electronically conducting metal oxide nanocrystals. Benefits include a solution that is more thermodynamically stable, and permits greater flexibility when processing dielectrics.

Background

It is difficult to integrate nanocrystalline particles within CMOS for memory structures. Generally, metal nanocrystals are not stable under standard CMOS processing conditions, due to thermal and chemical instabilities. Integrating conductive metallic nanocrystals into CMOS is only at the research stage. The main efforts to integrate nanoparticles within CMOS are as follows:

1.  Encapsulate the nanocrystals in a diffusion barrier material, so that at high temperatures oxygen can not attack the active nanocrystalline material, and the material can not diffuse out into the substrate, the surrounding dielectric, or into other nanocrystals (see Figure 1). 

2.  Modify the existing CMOS process to ensure low temperatures (<450oC) after the nanocrystals are incorporated into the structures, so that they are not exposed to conditions where they will degrade.

General Description

The disclosed method substitutes certain conductive elements in a CMOS device with thermally stable, electronically conducting metal oxide nanocrystals. The disclosed method defines nanocrystals as a single material structure with a dimension of less than 10nm (e.g. a sphere of  material with a diameter of less than 10nm embedded in a different material, or a column with a diameter less than 10nm, but length longer than...