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Determining the Mass Density, Bond Density, and Elemental Composition of a Material Using Fourier Transform-Infrared Spectroscopy

IP.com Disclosure Number: IPCOM000146717D
Publication Date: 2007-Feb-19
Document File: 3 page(s) / 22K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method that uses Fourier Transform-Infrared Spectroscopy (FTIR) to determine the concentration of all bonds and elements in a material, as well as the atomic/mass density. Benefits include a solution that directly samples the bulk of a material without the need for sputter profiling.

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Determining the Mass Density, Bond Density, and Elemental Composition of a Material Using Fourier Transform-Infrared Spectroscopy

Disclosed is a method that uses Fourier Transform-Infrared Spectroscopy (FTIR) to determine the concentration of all bonds and elements in a material, as well as the atomic/mass density. Benefits include a solution that directly samples the bulk of a material without the need for sputter profiling.

Background

The properties of any given material are determined by the concentration and types of bonds that form that material. Knowledge of the bond concentration enables the prediction of many materials properties, including the elastic modulus, fracture energy, and dielectric constant.

Several techniques exist for determining the elemental composition of a material (see Figure 1). A large percentage of these are surface sensitive and require sputtering through the material in order to measure "bulk" film compositions (e.g. Auger Electron Spectroscopy, X-ray Photoelectron Spectroscopy, and Secondary Ion Mass Spectroscopy). Others use high energy beams which can be damaging to underlying devices (e.g. Energy Dispersive X-ray Fluorescence).

Atomic and mass density are key parameters in determining the diffusion barrier performance of materials, as well as the fracture energy of materials. Several techniques exist for measuring the mass density or electron densities of materials, but no techniques so far can simultaneously determine the chemical and elemental bonds, and the mass densities of a material.

General Description

FTIR is an analytical technique which is typically used for qualitatively comparing the compositions of a material, or for quantita...