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CHEMICAL / BIOLOGICAL SENSING PLATFORM

IP.com Disclosure Number: IPCOM000199103D
Publication Date: 2010-Aug-26
Document File: 9 page(s) / 865K

Publishing Venue

The IP.com Prior Art Database

Abstract

The present invention discloses a chemical or biological micro-electro-mechanical system (MEMS) sensor. This invention is a bi-stable operation of MEMS devices to obtain a parametric resonant operation and a high sensitivity to analytes. Sensitivity is obtained by disposing a functionalized film on the MEMS device that responds to the analyte to obtain a large change in the device output. This parametric resonance operation is extended to operate in relatively viscous fluids to obtain chemical and/or biological analysis in air, gases or fluids. Non-linearity in the MEMS devices is used to achieve parametric resonance for a new breed of sensing platforms.

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RP13473

CHEMICAL / BIOLOGICAL SENSING PLATFORM

BRIEF ABSTRACT

    The present invention discloses a chemical or biological micro-electro- mechanical system (MEMS) sensor. This invention is a bi-stable operation of MEMS devices to obtain a parametric resonant operation and a high sensitivity to analytes. Sensitivity is obtained by disposing a functionalized film on the MEMS device that responds to the analyte to obtain a large change in the device output. This parametric resonance operation is extended to operate in relatively viscous fluids to obtain chemical and/or biological analysis in air, gases or fluids. Non- linearity in the MEMS devices is used to achieve parametric resonance for a new breed of sensing platforms.

KEYWORDS

    Chemical sensor, biological sensor, parametric resonance, MEMS, sensing in air, gas, fluids, viscous fluids, non-linearity in MEMS, sensing functionalized film.

DETAILED DESCRIPTION

    The present disclosure is related to a micro-electro-mechanical system (MEMS) based sensing system for measuring the properties of a sample, including detecting the presence of an analyte in a sample. Analyte means a particular kind of matter, organic or inorganic, such as a particular chemical, protein, virus, allergen, pathogen, molecule, analyte, etc., that is to be detected and/or measured.

    MEMS based sensing systems have been developed. Conventionally this problem is addressed using simple harmonic resonance. However, these simple

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RP13473

harmonic resonances are not highly sensitive and cannot be used to sense in air, liquids and other viscous fluids. There remains a need for improved accurate, sensitive and reliable sensing systems.

    Therefore there is a need in the art for an improved accurate sensor which is a more sensitive sensing platform.

    Figure 1 is a block diagram illustrating the working of the present invention. The present invention utilizes a MEMS sensor platform. The MEMS sensor platform is a dynamic bi-stable system. The MEMS sensor platform includes a parametric resonant element that generates parametric resonance. The MEMS sensor utilizes parametric resonance amplification. The bi-stable system with parametric resonant operation in the MEMS sensor platform is used to obtain air based biological sensing and in relatively viscous fluids to obtain chemical sensing and biological analysis in fluids. Figure 2 illustrates the chemical / Bio sensor which are used in air and fluid applications.

    The MEMS sensor platform has a biological and/or chemical sensing component for sensing an analyte and indicates the presence of the analyte. The sensing component of the MEMS sensor further includes a compensator for enhancing the sensing function and an output component. The compensator includes a controller for controlling the functions of the sensing component. The controller includes an analog processor, a switch, a digital signal processor, a digital computing device or an analog computing device. The contro...