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High Temperature Accelerometer using MEMS Array for increased accuracy and resolution

IP.com Disclosure Number: IPCOM000199604D
Publication Date: 2010-Sep-10
Document File: 1 page(s) / 8K

Publishing Venue

The IP.com Prior Art Database

Abstract

MEMS (Micro-Electro-Mechanical Systems) can be used as accelerometers in downhole tools. They have the capability to be used at high (175°C - 200°C) temperatures and in special cases even above. They normally have a poor resolution and accuracy. Since these devices are very small and comparably cheap this idea focuses on using multiple of these sensors for the same purpose in order to boost both accuracy and resolution. With techniques used in other areas (antennas, optics, etc.) a poor resolution signal with a high noise content can potentially be filtered, processed, amplified, etc. using more than one sensor output for the same sensed information.

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Title of Invention:

High Temperature Accelerometer using MEMS Array for increased accuracy and resolution

Abstract of the Invention:

MEMS (Micro-Electro-Mechanical Systems) can be used as accelerometers in downhole tools. They have the capability to be used at high (175°C - 200°C) temperatures and in special cases even above. They normally have a poor resolution and accuracy. Since these devices are very small and comparably cheap this idea focuses on using multiple of these sensors for the same purpuse in order to boost both accuracy and resolution. With techniques used in other areas (antennas, optics, etc.) a poor resolution signal with a high noise content can potentially be filtered, processed, amplified, etc. using more than one sensor output for the same sensed information.