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Correction of Beam-Shift Induced Energy Shift in Electron Energy-Loss Spectroscopy

IP.com Disclosure Number: IPCOM000199849D
Publication Date: 2010-Sep-17
Document File: 1 page(s) / 11K

Publishing Venue

The IP.com Prior Art Database

Abstract

In electron energy-loss spectroscopy a shift of the electron beam causes a shift of the cross-over point of the electron energy-loss spectrometer. This in turn results in a shift of the energy-loss spectrum that can be as high as 40 eV at the lowermost STEM magnification and a camera length of 100 mm. As a consequence multi-point analysis data (line or image) contain spectra that are shifted relative to one another. These shifts cause systematic errors in the processing needed to extract profiles or images.

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Correction of Beam-Shift Induced Energy Shift in Electron Energy-Loss Spectroscopy

    In electron energy-loss spectroscopy a shift of the electron beam causes a shift of the cross-over point of the electron energy-loss spectrometer. This in turn results in a shift of the energy-loss spectrum that can be as high as 40 eV at the lowermost STEM magnification and a camera length of 100 mm. As a consequence multi-point analysis data (line or image) contain spectra that are shifted relative to one another. These shifts cause systematic errors in the processing needed to extract profiles or images.

    The only current solution is to use a descan facility, whereby a beam shift is counteracted by an opposite image shift. Due to hardware constraints descan cannot be implemented on some microscopes and thus far users have been unable to obtain results in which the negative effects and consequent processing errors are absent. The descan function itself was already present on some early, pre-1985 microscopes.

    The invention is a calibration method to determine the relation between beam-shift and energy-shift direction and magnitude, the method for determining the required correction of the energy shift of a spectrum from the beam position, and the method for correcting the energy shift (either on stored data or during spectrum acquisition).

    The direction of the energy shift is related to the direction of the beam shift, while the magnitude is related to the magnitude of the beam shi...