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A Test Structure for Measuring Resistance of Individual Contact Resistances for a Multi-level Contact Stack

IP.com Disclosure Number: IPCOM000211770D
Publication Date: 2011-Oct-17
Document File: 2 page(s) / 53K

Publishing Venue

The IP.com Prior Art Database

Abstract

A test structure for measuring resistance of individual contact resistance for a multi-level contact stack is disclosed. The test structure includes three sense pads and determines the contact resistance of each level of Trench Silicide stack by measuring the voltage drop between any two of the three sense pads.

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A Test Structure for Measuring Resistance of Individual Contact Resistances for a Multi-level Contact Stack

Conventional techniques and methods of determining resistance measure resistance for the whole stack rather than for individual levels of Trench Silicide (TS) stack. Fig. 1 illustrates one such conventional method for measuring resistance of a multi-level stack. As shown in Fig. 1, "M1" represents a metal layer and "RX" represents the ground (GND) terminal. The voltage drop is measured by sense pads "Sense1" and "Sense2"
to obtain the resistance of the whole TS stack.

Figure 1

Disclosed is a test structure for measuring resistance of individual contact resistance for a multi-level contact stack. The test structure includes three sense pads and determines resistance of each level of Trench Silicide (TS) stack by measuring voltage drop between any two out of the three sense pads. The test structure therefore enables effective process monitoring by using the obtained values of resistances for each level.

Fig. 2 illustrates the test structure used for measuring resistance of each level of TS stack. As shown in Fig. 2, three sense pads "Sense1", "Sense2" and "Sense3" are used in the test structure instead of two sense pads used in Fig. 1. Resistance of each level of the stack is obtained by measuring voltage drop between any two of the three sense pads.

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Figure 2

Fig. 3 illustrates cross-sectional view of Fig. 2 where green arrow represents flow of...