METHOD FOR IMPROVED TEMPERATURE CONTROL USING HEATER JACKETS
Publication Date: 2011-Dec-13
The IP.com Prior Art Database
Utilizing the heater jacket with an improved thermocouple mounting being incorporated, temperature of the part will be obtained more efficiently and precisely. Further, when jackets are removed for maintenance, the heater element and thermocouple stay in the exact same position to relieve any concerns about inaccurate readings after maintenance work.
This invention allows the operator to control the temperature of the fluid line and the heater jacket by measuring the temperature of the part being heated rather than measuring the thermal element therein.
A few degrees variance in the temperature, either too cold or too hot, has significant impact on the process. Precursor gas which is too cold will condensate and ruin process results. Similarly, if the precursor gas gets too hot it will decompose, also ruining process results. For some precursors, the temperature range between these two extremes can be small. This requires a better method of temperature measurement.
Prior art heater jackets only measure the jacket temperature and do nothing to measure the actual part which is being heated (i.e. the fluid conduit or pipe, valve, etc.). Typically the thermocouple (TC) is actually located between two heater elements without having any form of thermal isolation. This arrangement makes reading the temperature of the part impossible.
Prior art heater tape usefulness is dependent on the person applying it. It is difficult, if not impossible to obtain the same thermal uniformity once the heater tape is removed (for maintenance) and then reapplied, particularly if trying to keep temperature control within a +/- 10 Celsius temperature range). Furthermore, the thermocouples in this case are applied as a separate component to the heated part, which can cause problems if the...