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Method and System for Altering Fin Shape by Etching and Thermal Processing

IP.com Disclosure Number: IPCOM000216720D
Publication Date: 2012-Apr-16
Document File: 3 page(s) / 57K

Publishing Venue

The IP.com Prior Art Database

Abstract

A method and system for altering a shape of one or more fins using a combination of etching and thermal processing is disclosed. The combination of etching and thermal processing may include different processes including, but not limited to, an isotropic etching, a directional (001) etching, an agglomeration process, a limited (111) etching, a thermal surface migration and implant damage or amorphization followed by etching.

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Method and System for Altering Fin Shape by Etching and Thermal Processing

Disclosed is a method and system for altering a shape of one or more fins using a combination of etching and thermal processing. The combination of etching and thermal processing may include different processes including, but not limited to, an isotropic etching, a directional (001) etching, an agglomeration process, a limited (111) etching, a thermal surface migration and implant damage or amorphization followed by etching. The altering of the shape of the one or more fins may be performed after an initial fin formation. The altering of the shape of the one or more fins after the initial fin formation may make a final cross-section of the one or more fins independent of a process used for the initial fin formation. Also, the altering of the shape of the one or more fins after the initial fin formation may permit independent optimization of the initial fin formation and the final cross-section of the one or more fins. Additionally, the altering of the shape of the one or more fins after the initial fin formation may change an electrical behavior of a device or change an integration flow required to complete the device. The final cross-section of the one or more fins may be created by removing Silicon on Insulator (SOI) present between the one or more fins. The figure 1 shows various shapes of the one or more fins.

Figure 1

The figure 2 shows the altering of the shape of the one or more fi...