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A Printable Dielectric for Repairing Keyholes in a Dielectric Fill

IP.com Disclosure Number: IPCOM000219189D
Publication Date: 2012-Jun-25
Document File: 1 page(s) / 19K

Publishing Venue

The IP.com Prior Art Database

Abstract

A method and system for repairing keyholes in a dielectric fill immediately before gate stack deposition is disclosed. A printable dielectric is used to repair the keyholes in the dielectric.

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A Printable Dielectric for Repairing Keyholes in a Dielectric Fill

Gap fill is a particularly complex task for replacement gate process flows targeting tight gate pitch. Tall dummy gate stacks are often necessary to provide the process margin needed to accommodate an on-wafer topology and a chemically and mechanically planarized (CMP) non-uniformity. Spacers are needed for junction engineering as well as to prevent epitaxial growth on or silicidation of the dummy gate in the case of polymer silicon dummy gates. Subsequently, an increase in the aspect ratio of the space that must be filled with dielectric for the replacement gate flow is achieved. However, most deposition processes fail to completely fill the space between dummy gates with dielectric. As a result, a keyhole is produced which is usually filled by a gate stack.

Disclosed is a method and system for repairing keyholes in a dielectric fill immediately before gate stack deposition is disclosed. A printable dielectric is used to repair the keyholes in the dielectric. Once gate stack is deposited, and the CMP back down to the gap-fill dielectric, thereafter the printed dielectric remains only inside the keyholes.

The printable dielectric has the advantage of being a spin-on, and can fill key-holes in the dielectric which have been exposed during the first replacement gate CMP. The alignment required between the keyhole repair lithography and the gate edge is relaxed as keyholes tend to be small and occur...