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Method of manufacturing a chamber with cooling channel

IP.com Disclosure Number: IPCOM000219467D
Publication Date: 2012-Jul-03
Document File: 1 page(s) / 47K

Publishing Venue

The IP.com Prior Art Database

Abstract

This invention uses a casting to produce the chamber. Because a pipe has been cast directly into the chamber body, the appearance is good, and the size is smaller than that of conventional chamber. Although it is difficult to control temperature uniformly by the conventional chamber especially for 450mm tool, the casting technique contributes to obtain good temperature uniformity of heat transfer.

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Method of manufacturing a chamber with cooling channel


1. Describe the existing solutions and their drawbacks

A heater and a coolant water pipe are attached to maintain a process chamber and a transfer chamber at constant temperature. The water coolant pipe is fixed to a body by a screw or welding, resulting in poor appearance, bigger size, and instability of temperature condition.


2. Describe the novelty features and the benefits of the proposed invention over the current solution
This invention uses a casting to produce the chamber. Because a pipe has been cast directly into the chamber body, the appearance is good, and the size is smaller than that of conventional chamber. Although it is difficult to control temperature uniformly by the conventional chamber especially for 450mm tool, the casting technique contributes to obtain good temperature uniformity of heat transfer.


3. Drawings

Casted Pipe

Chamber Body

OUT

IN