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Adaptive test solution to dynamically identify and remove abnormal devices that affect the testing of parallel testable semiconductor devices

IP.com Disclosure Number: IPCOM000223296D
Publication Date: 2012-Nov-15
Document File: 1 page(s) / 18K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method for device testing that enables accurate data reporting for all devices at the speed needed to test devices in parallel, resulting in faster yield and process learning. The method initially identifies and removes devices measuring outside of an acceptable threshold limit, leaving only devices within an acceptable threshold limit for measuring, resulting in more accurate testing data.

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Adaptive test solution to dynamically identify and remove abnormal devices that affect the testing of parallel testable semiconductor devices

Parallel testing of devices allows the simultaneous testing of a group of devices through a single measurement strobe, collecting relevant volume device electrical data used to characterize devices for yield learning and process improvement. A problem occurs when faulty (i.e., leaky) devices that are part of the test group affect good devices, resulting in the reporting of false fails for good devices.

A known solution is to test devices in serial mode (i.e., individually). The drawback for this solution is that it slows the rate at which testers can collect data and leads to a reduced number of devices tested in order to meet the allotted test budget. This results in a slower rate of learning yield for process improvements.

The disclosed solution requires an initial parallel test with all testable devices that shall identify devices measuring outside of an acceptable threshold limit. These devices are then removed, as they have the potential to cause good devices to report inaccurate readings when influenced by abnormal devices. Devices measuring within the criteria for threshold limit are then re-measured, reporting accurate data for all devices measured.

This method enables accurate data reporting for all devices at the speed needed to test devices in parallel, resulting in faster yield and process learning. The steps f...