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A Method for Feeding-in Composition Data from Energy Dispersive X-Ray Analysis to Scatterometry

IP.com Disclosure Number: IPCOM000231103D
Publication Date: 2013-Sep-26
Document File: 2 page(s) / 49K

Publishing Venue

The IP.com Prior Art Database

Abstract

A method for feeding-in composition data from Energy Dispersive X-Ray Analysis (EDX) to an algorithm is disclosed. The algorithm determines the best match for the optical material properties to feed into a scatterometry model. Thereafter, the algorithm iterates until the measurements match to give a more precise measurement.

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A Method for Feeding-in Composition Data from Energy Dispersive X -Ray Analysis to Scatterometry

Model based metrology techniques are highly dependent on one or more material properties such as, but not limited to, dielectric function and magnetic susceptibility. However, there is no reliable method of inputting one or more correct material properties into in-line measurements.

Disclosed is a method that utilizes scatterometry and Energy Dispersive X-Ray Analysis (EDX) for different targets. For instance, for a simple 2D fin only or PC only targets, EDX is used and for a 3D finFET, scatterometry is used. In accordance with the method disclosed herein, material composition data is fed from EDX to a central algorithm. The algorithm determines the best match for the optical material properties to feed into a scatterometry model. Here, a physical model derived from composition of the material and a pre-constructed look-up table are utilized. The pre-constructed look-up table contains one or more material properties such as, but not limited to, concentration, thickness, density as a function of process parameters. In an embodiment, when data is available from an external source, the look-up table accepts values from external sources as input and appropriate material properties are generated as output. The output generated by the look-up table is used for processing the next step in the algorithm. In another embodiment, the look-up table can be calibrated based on Dep...