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UV lamp house

IP.com Disclosure Number: IPCOM000233144D
Publication Date: 2013-Nov-26
Document File: 1 page(s) / 112K

Publishing Venue

The IP.com Prior Art Database

Abstract

1. Problem Square shape of hood mirror in UV Lamp house is suggested. However, there is large useless area (much larger than wafer) and the size of the lamp house is large.

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1. Problem

Square shape of hood mirror in UV Lamp house is suggested. However, there is large useless area (much larger than wafer) and the size of the lamp house is large.


2. Solution

Octagonal reflector is proposed to reduce the space.

As shown in Fig 1, the square lamp house has large useless area. The octagonal one has small useless area and the good illumination distribution. The cylindrical one has small useless area but the bad illumination distribution.

Shape
of Lamp House

Cross-s ection shape

Square

Circle

Octagon

Octagon

UV illuminat ion distributi on

φ 300mm Uniformity


±4.2%

φ450mm Uniformity


±15.4%

φ450mm Uniformity
±4.8%

φ450mm Uniformity


±5.1%