Publication Date: 2014-Jan-15
The IP.com Prior Art Database
A sensor device comprises a sensitive element (1) and a support (2) for the sensitive element, the sup-port having a surface (3) with an access opening (4) to the sensitive element (1). A layer of adhesive material (5) covers at least parts of the surface (3). A venting medium (6) extends over the entire surface (3) of the support (2) and the access opening (4) and is attached to the support (2) by the layer of adhesive material (5).
Page 01 of 16
A sensor device comprises a sensitive element
(1) and a support (2) for the sensitive element, the sup- port having a surface (3) with an access opening (4) to the sensitive element (1). A layer of adhesive material
(5) covers at least parts of the surface (3). A venting medium (6) extends over the entire surface (3) of the support (2) and the access opening (4) and is attached to the support (2) by the layer of adhesive material (5).
FIELD OF THE INVENTION
The present invention relates to a sensor de- vice and a method for manufacturing a sensor device.
BACKGROUND OF THE INVENTION
Sensor devices and methods for manufacturing sensors devices are known. In the European patent appli- cation no. EP 2 481 703 A1 for example, there is de- scribed a method for manufacturing a sensor device, wherein a spacer is arranged at the front side of a sub- strate at which front side a sensitive element is ar- ranged, too. Holes are etched for building vias extending through the substrate between the front side of the sub- strate and its back side. After etching, the holes are filled with conductive material to complete the vias. The spacer provides protection to the sensitive element and the sensor device throughout the manufacturing process.
In sensor devices the sensitive element may be sensitive to contaminants, such as particles and/or
Page 02 of 16
liquids, e.g. water or oil. When a sensor device is manu- factured, especially in a batch process, there may be contaminations arising during device singulation, e.g. by sawing or laser cutting.
SUMMARY OF THE INVENTION
Hence, according to a first aspect of the in- vention, there is provided a sensor device, with a sensi- tive element and a support for the sensitive element. The sensitive element is protected against contaminants, such as particles, and/or liquids, such as water or oil, by means of a venting medium.
The term "venting medium" as used herein des- ignates a medium that enables the passage of gas through the venting medium while liquids and contaminants are in essence repelled at the surface. The venting medium may be a venting layer or a venting film.
In a preferred embodiment the venting medium is based on or made from one or more of polymer - espe- cially fluoropolymer, PTFE, acrylic copolymer, polyether- sulfone polymer - glass fiber, porous organic material or porous inorganic material.
As different types of venting media may dif- fer in their ability to repel different kinds of liquids, e.g. water or oil based liquids, a combination of several venting media in form of a material mixture or in form of a multi-layer may be used as a venting medium.
Additionally, the venting medium may protect the sensing element to some extent against direct mechan- ical contact from outside of the sensor device.
The term "support" as used herein may contain one or more of a die, a chip, a substrate, e.g. a glass substrate or a ceramic substrate or a semiconductor sub- str...