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A Method for Optimizing Corner Rounding and Connectivity for Inner Vertices by Stitching Designs to Reduce Corner Rounding

IP.com Disclosure Number: IPCOM000235769D
Publication Date: 2014-Mar-25
Document File: 5 page(s) / 80K

Publishing Venue

The IP.com Prior Art Database

Abstract

A method is disclosed for optimizing corner rounding and connectivity for inner vertices by stitching designs to reduce a corner rounding radius (CRR), increasing an overlapping area, increasing the minimum pitching width and improving the line end pattern fidelity.

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A Method for Optimizing Corner Rounding and Connectivity for Inner Vertices by Stitching Designs to Reduce Corner Rounding

Disclosed is a method for optimizing corner rounding and connectivity for inner vertices by stitching designs to reduce corner rounding, increasing an overlapping area, increasing the minimum pitching width and improving the line end pattern fidelity. The method can include simulating corner rounding, the overlapping area, the minimum pitch width and the line end pattern fidelity, for identifying an optimum solution.

In one implementation, the method includes a step of designing a two dimensional shape for an L shape design as shown in fig. 1.

Figure 1

Fig. 1 also illustrates a parameter D used in balancing a reduction in corner rounding (CR), an increase in the overlapping area, an increase in the minimum pinching width and an increase in the line end pattern fidelity.

The method further includes the step of designing another two dimensional shape for T shape design as shown in fig. 2.

1


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Figure 2

The method can also include a step of identifying a corner rounding specification using design specification. The design specification can be modeled using design parameters such as parameters d1, a1, r1, d2, a2 and r2 as illustrated in fig. 3 below.

Figure 3

In quantifying an impact of the design specification on the corner rounding specification, two rule values a1 and a2 can be used. Rule value a1 and rule value a2 can be calculated using the formulae shown below.

Rule value a1 = {(OVLY_A-B)^2 + [(CDU of A)/2]^2 + [(CDU of B)/2]^2 +2*(LER_A^2)+2*(LER_B^2)}^ 0.5 +BIAS_A_TOP/2 + BIAS_B_TOP/2 + minimum insulator value + d1

Rule value a2 = {(OVLY_A-B)^2 + [(CDU of A)/2]^2 + [(CDU of B)/2]^2 +2*(LER_A^2)+2*(LER_B^2)}^ 0.5 +BIAS_A_TOP/2 + BIAS_B_TOP/2 + minimum insulator value + d2

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