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A Method and System for Accurate Extraction of Parasitic Capacitance

IP.com Disclosure Number: IPCOM000235787D
Publication Date: 2014-Mar-25
Document File: 2 page(s) / 57K

Publishing Venue

The IP.com Prior Art Database

Abstract

A method and system is disclosed for measuring MOL parasitic capacitance (Cmol) accurately to account for parasitic capacitance from device overlap capacitance. The method and system proposes improved structures for MOL parasitic capacitance by minimizing Tinv impact due to EG IL and also minimizing Cdo(capacitance in overall region) variations by implant skip and minimum halo shadowing effect.

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A Method and System for Accurate Extraction of Parasitic Capacitance

Overlap capacitance, Cov is one of the key metrics to determine device performance of short-channel devices regarding short-channel effects and channel resistance. In current technology definition such as 20LPE and 14LPE, reliable extraction of MOL parasitic capacitance is very important for device design. However, it is difficult to extract exact MOL parasitic capacitance due to process complication of strapping and removing contacts for design rule and GR perspective. The disclosed method and system helps measure MOL parasitic capacitance accurately to account for parasitic capacitance from device overlap capacitance.

Fig. 1 illustrates an existing Cov structure for Cmol extraction.

Fig. 1

As illustrated in Fig. 1, a series of Cov structures with different TS strapping may lead to different S/D overgrowth and shape when TS is not fully strapped. Thus, it may impact Cof (outer fringe capacitance) unintentionally. Also, a series of Cov structures with different CPP may lead to Cdo variations due to potential implant variations in various CPP.

Fig. 2 illustrates a Cov structure for Cmol extraction in accordance with the method and system disclosed herein.

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Fig. 2

As illustrated in Fig. 2, a minimum Tinv impact is present due to EG IL. Also, the structure minimizes Cdo variations by implant skip and minimum halo shadowing effect.

Fig. 3 illustrates a structure for accurate Cmol extr...