Method and System for Accurately Measuring Back End of Line (BEOL) Wire Resistance
Publication Date: 2014-May-19
The IP.com Prior Art Database
A method and system is disclosed for measuring Back End of Line (BEOL) wire resistance accurately using compact structures.
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Method and System for Accurately Measuring Back End of Line ( Resistance
Currently, certain Back End of Line (BEOL) wire resistance macro designs can measure a long wire, possess 11 Kelvin structures for a macro using a 1x25 pad, but the designs use too much silicon area. Some of the BEOL wire resistance macro designs can measure long wire, possess 11 Kelvin structures for a macro using a 1x25 pad and uses less silicon area, but a small or non-zero amount of electric current is present in sense wire. Due to the electric current in the sense wire, the measured wire resistance is inaccurate
Disclosed is a method and system for measuring BEOL wire resistance accurately using compact structures. The method and system eliminates a loop between a pair of (force, sense) pads to generate a compact structure. In one embodiment, Fig. 1 shows a scenario where a longer BEOL wire line (device under test, i.e., DUT) using a sense line with several turns.
In another embodiment, Fig. 2 illustrates another scenario where a shorter BEOL wire line (DUT) using a simple straight sense line.
When two BEOL wire structures are from 2 different BEOL metal levels, the method and system utilize via(s) to connect two sense lines in the two different metal levels, as
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illustrated in Fig. 3.
Further, the method and system can also be implemented in a scenario where 11 devices are in the same BEOL metal level. As illustrated in...